Gas Abatement Systems

What are Exhaust Abatement Systems?
Exhaust Abatement Systems, also known as abatement equipment or scrubbers, are used to detoxify various gases used in manufacturing processes and discharge them safely into the atmosphere.
Depending on the type or volume of gas to be discharged, these systems employ a variety of treatment methods, including combustion, wet, dry, and catalytic systems. They are increasingly being used in many different fields, such as in the electronic device industry, including semiconductor manufacturing, as well as in chemical plants, plating and painting processes, and decomposition of refrigerant in air conditioners.


01. Abatement of perfluorocarbons (PFCs), global warming gases (GWGs), toxic gases, flammable gases, and odorous gases
02. Point-of-Use Abatement (POU) systems with compact design


EBARA’s strengths in Exhaust Abatement Systems
High-efficiency treatment of perfluorocarbons (PFCs) and global warming gases (GWGs), excellent system safety, and optimal maintenance with countermeasures against byproduct deposition.

EBARA offers a wide range of exhaust abatement systems to treat different types of gasses. They include systems that offer high-efficiency treatment of perfluorocarbons (PFCs) and global warming gases (GWGs) that are difficult to treat, systems that deliver safe treatment of flammable gases such as hydrogen gas, and systems for the detoxification of gases that contain toxic substances such as arsenic.

Our diverse product lineup includes combustion-type exhaust abatement systems that enable batch processing of perfluorocarbons (PFCs), global warming gases (GWGs), and flammable gases, as well as dry systems that need no effluent treatment, catalytic systems that require no fuel, and wet systems that use water treatment.

Combustion-type gas abatement systems reduce the duration and frequency of maintenance with various countermeasures against byproducts, such as EBARA’s proprietary burners and byproduct removal functions. In addition, these systems are equipped with an on-demand operation feature, which allows operating conditions, such as fuel feed volumes, to be changed according to the type and volume of gas to be treated. This helps to reduce running and maintenance costs.