Dry Vacuum Pumps

What are Dry Vacuum Pumps?

Dry vacuum pumps are non-contact vacuum pumps that feature oil-free, liquid-free sealing. They achieve a clean vacuum without back-flow or diffusion of water and oil. No regular maintenance, such as replenishing or replacing water or oil, is required, which makes these pumps easy to handle.

These pumps are indispensable in manufacturing processes of semiconductor devices, FPDs, LEDs, and solar batteries, which require a high degree of cleanliness. Their applications have expanded in recent years because it allows easy, clean exhaustion of gas from analyzers such as mass spectrometers and electronic microscopes. Capable of generating clean vacuums and offering maintenance convenience, they are also used in a variety of other applications, such as vacuum drying processes and film coating processes.


01. Oil-free, clean vacuum
02. Able to achieve pressure environments from atmospheric pressure to high vacuum
03. Regular maintenance, such as replenishing or replacing water or oil, is not required

EBARA’s strengths in Dry Vacuum Pumps

Compact and energy-saving design Reassuring global support and an extensive product lineup
With features such as low energy consumption and compact design, EBARA’s dry vacuum pumps are used in various fields.

With its unique optimized rotor design, this product improves compression efficiency and achieves low power consumption. With their compact, lightweight design, our dry vacuum pumps are easy to install even in limited spaces and can also be relocated. EBARA has shipped a total of over 200,000* units around the world for use in various fields, particularly the semiconductor industry, which has strict requirements for performance and reliability. Ebara has over 50 service centers worldwide, from which we provide reassuring services globally. Choose the model that is most suited to your needs from our extensive product lineup, including compact and lightweight models that are of the highest standard in the industry, hydrogen exhaust models, and heavy-duty models that deal with processes that generate reactive byproducts.

*As of September 2020