EBARA Combustion-Type Exhaust Abatement System

Combustion-type exhaust abatement system with low NOx emissions and abundant reaction byproduct measures for reduced maintenance costs.


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Combustion-type exhaust abatement system capable of simultaneous abatement of large volumes of hydrogen and chlorine gas

  • Combustion-type exhaust abatement systems
  • Treat large volumes of chlorine gas and hydrogen gas simultaneously
  • Batch treatment of multiple gas types
  • Highly efficient abatement of PFCs
  • Byproduct removal

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Combustion-type exhaust abatement system that offers highly efficient treatment of flammable gases and perfluorocarbons (PFCs)

  • Combustion-type exhaust abatement systems
  • Batch treatment of multiple gas types
  • Highly efficient abatement of PFCs
  • Byproduct removal measures/automatic removal of powdery byproducts
  • Low running

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