EBARA Combustion-Type Exhaust Abatement System
Combustion-type exhaust abatement system with low NOx emissions and abundant reaction byproduct measures for reduced maintenance costs.
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Combustion-type exhaust abatement system capable of simultaneous abatement of large volumes of hydrogen and chlorine gas
- Combustion-type exhaust abatement systems
- Treat large volumes of chlorine gas and hydrogen gas simultaneously
- Batch treatment of multiple gas types
- Highly efficient abatement of PFCs
- Byproduct removal
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Combustion-type exhaust abatement system that offers highly efficient treatment of flammable gases and perfluorocarbons (PFCs)
- Combustion-type exhaust abatement systems
- Batch treatment of multiple gas types
- Highly efficient abatement of PFCs
- Byproduct removal measures/automatic removal of powdery byproducts
- Low running
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