Vacuum Turbomolecular Pumps, Low Power Dry Vacuum Pump, EBARA Dry Vacuum Pump
Dry vacuum pump with low power consumption, ideal for performance for high-load applications
- High-load applications
- High-temperature operation control
- Low power consumption
- Corrosion resistant materials employed as standard
- Enhanced corrosion resistant options
- Identical pumping performance regardless of frequency
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Dry vacuum pump with low power consumption and small footprint
- Low power consumption
- Compact and light weight
- Corrosion resistant material options
- N2 purge model option available
- Identical pumping performance regardless of frequency (50/60 Hz)
- Oil-free
- CE marking/SEMI-S2/NRTL available
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