EBARA Exhaust Abatement System

Optimal for low-cost treatment of water-soluble gas, space-saving, wet-type exhaust abatement system

• Wet-type exhaust abatement system
• Multiple gas batch processing
• Countermeasures against by-products
• Long-term maintenance interval
• Low running costs
• Low initial costs
• Possible to deal with CE

Combustion-type exhaust abatement system with low NOx emissions and abundant reaction byproduct measures for reduced maintenance costs.

Dry abatement system for treatment of hazardous substances such as arsenic and phosphorous without need for water scrubbing

• Best suited for research facilities
• Adsorbs specific chemical substances

Highly efficient, energy-saving catalysis-type exhaust abatement system

• Catalysis-type exhaust abatement system
• Low power consumption
• Highly efficient abatement of PFC gases
• No fuel required
• Low maintenance costs

Combustion-type exhaust abatement system capable of simultaneous abatement of large volumes of hydrogen and chlorine gas

• Combustion-type exhaust abatement systems
• Treat large volumes of chlorine gas and hydrogen gas simultaneously
• Batch treatment of multiple gas types
• Highly efficient abatement of PFCs
• Byproduct removal

Combustion-type exhaust abatement system that offers highly efficient treatment of flammable gases and perfluorocarbons (PFCs)

• Combustion-type exhaust abatement systems
• Batch treatment of multiple gas types
• Highly efficient abatement of PFCs
• Byproduct removal measures/automatic removal of powdery byproducts
• Low running

Dry exhaust abatement system for highly efficient and safe treatment of PFC gases with no need for water scrubbing

• Dry exhaust abatement system
• Low power consumption
• Highly efficient abatement of PFC gases
• Solidification of fluorine series gases
• No water scrubbing required
• No fuel required