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Model EV-M

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Dry vacuum pump with low power consumption, ideal for performance for high-load applications
  • High-load applications
  • High-temperature operation control
  • Low power consumption
  • Corrosion resistant materials employed as standard
  • Enhanced corrosion resistant options
  • Identical pumping performance regardless of frequency (50/60 Hz)
  • Oil-free
  • CE marking/SEMI-S2/NRTL available

Features and Benefits

With EBARA’s unique heat-resistance technology, the Model EV-M range is designed for high-load applications where large volumes of reaction byproducts are generated in semiconductor, liquid crystal, and solar cell manufacturing processes. With its outstanding power consumption performance, the Model EV-M range has mastered the balance between resistance to high-load applications and energy efficiency. Robust anti-corrosion materials are employed as standard. A large-capacity model offering a pumping rate of 110,000 L/min is also available. The extensive product line-up caters to a wide range of high-load applications to match process conditions.

Specifications

 
Model Unit EV-M20N EV-M102N EV-M202N EV-M302N EV-M502N EV-M505SF EV-M802N EV-M805SF EV-M1205SF
Pumping Speed L/min 1,800 10,000 20,000 30,000 50,000 50,000 80,000 80,000 110,000
Ultimate Pressure Pa 5.0 0.5 0.5 0.5 0.5 0.5 0.5 0.5 0.5
Connection Inlet   NW40 ISO100 ISO100 ISO100 ISO160 ISO160 ISO200 ISO200 ISO200
Outlet   NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40
Approx. Power at Ultimate Pressure kW 1.2 1.8 1.9 2.3 2.1 3.9 2.8 4.6 5.3
Cooling water Flow rate L/min 3~8 3~8 3.5~8 4~8 5~8 5~8 5~8 5~8 5~8
Temperature Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30
N2 Flow rate Pa•m3/s 26~31 26~31 26~31 26~31 28~33 228 28~33 228 34~35
Power Supply
Phase/Volt/Freq.
200V Models   3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
400V Models   3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
- 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
Power capacity kVA 3.3 5.4 6.0 6.8 7.1 15.7 8.3 19.4 14.2
Weight kg 170 320 360 400 500 580 740 820 870

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