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Model EST

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Dry vacuum pump suitable for handling reaction byproducts and for fast pump-down requirements in large-volume chambers
  • High-temperature operation control
  • High exhaust speeds
  • Large pumping volumes
  • Corrosion resistant materials employed as standard
  • Enhanced corrosion resistant options
  • High-load applications
  • Identical pumping performance regardless of frequency (50/60 Hz)
  • Oil-free
  • CE marking/SEMI-S2/NRTL available

Features and Benefits

The Model EST range uses a screw-type rotor and is equipped with a high-temperature operation function to maintain gas in the pump at high temperatures. Best suited for applications where reaction byproducts are generated, such as CVD. With corrosion resistant materials employed as standard, this model achieves high exhaust speeds and large pumping volumes and contributes to process efficiency by curbing downtime.

Specifications

 
Model Unit EST10N EST25N EST100WN EST200WN EST300WN EST500WN EST800WN
Pumping Speed L/min 1,000 2,500 10,000 20,000 30,000 50,000 80,000
Ultimate Pressure Pa 2.7 0.4 0.4 0.4 0.4 0.4 0.5
Connection Inlet   NW40 NW40 NW50 NW100 NW100 ISO160 ISO200
Outlet   NW40 NW40 NW40 NW40 NW40 NW40 NW40
Approx. Power at Ultimate Pressure kW 2.3 3 3.2 3.2 4.5 4.6 4.6
Cooling water Flow rate L/min 5~8 5~8 5~8 5~8 5~8 5~8 5~8
Temperature Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30
N2 Flow rate Pa•m3/s 13~18 13~18 24~29 24~29 28~31 28~31 28~31
Power Supply
Phase/Volt/Freq.
200V Models   3-phase/200-220V,50/60Hz 3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
400V Models   3-phase/380-440V,50/60Hz 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
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Power capacity kVA 4.6 7.3 8.2 8.5 12.7 15.1 16.0
Weight kg 260 300 380 430 500 550 840

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