Dry exhaust abatement system for highly efficient and safe treatment of PFC gases with no need for water scrubbing
- Dry exhaust abatement system
- Low power consumption
- Highly efficient abatement of PFC gases
- Solidification of fluorine series gases
- No water scrubbing required
- No fuel required
Features and Benefits
Model FDS is a dry exhaust abatement system that enables highly efficient and safe treatment of PFC gases with no need for water scrubbing. Capable of highly efficient treatment of at least 99.9% of PFC gases, and with the dry solidification of fluorine series gases after decomposition, no wastewater is generated and there is no need for treatment of toxic wastewater. Dual-cylinder types offer PFC removal efficiency of 99% or more at a maximum gas inflow rate of 250 L/min (in case of 250-L/min dual-cylinder type) and major improvements in system up time due to reactor vessel serial flow design, while a single-cylinder type enables easy replacement of existing dry exhaust abatement systems. Ideal for research laboratories that do not have wastewater treatment equipment or fuel lines.
Specifications
| Model |
Unit |
FDS100S |
FDS250 |
| Abatement method |
Dry |
Dry |
| Reactors |
1 |
2 |
| Reactor life detector |
Standard: Load cell
Option: PFC detector |
Standard: PFC detector |
| Max. inflow gas volume |
L/min |
100L/min |
250L/min |
| Dimensions |
W x D x H mm |
600×600×2,000mm |
1,605×1,000×2,507 |
| Agent life |
L/本 |
CF4: 3,000 |
CF4: 10,000 |
| Gases |
CF4, C2F6, C3F6, CHF3, SF6, C5F8, C4F6, NF3, etc. |
CF4, C2F6, C3F6, CHF3, SF6, C5F8, C4F6, NF3, etc. |
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